A Study of Parameters Related to the Etch Rate for a Dry ...
Figure 4. (a) Etch rates of SF 6 /O 2 and NF 3 /O 2 and (b) optical emission intensity of fluorine for SF 6 /O 2 and NF 3 /O 2 as a function of power ratio. In Figure 5, the voltages obtained under the same conditions are shown. As was the case in Figure 4 (a), the etch rate did not directly depend on the voltages.